The Minilock Duo allows two independent process modules to be coupled to a vacuum loadlock. The vacuum loadlock is a separate chamber to load the samples. It has a slit valve to each module that allows the reactor chambers to stay under vacuum, which increases a researcher’s capabilities by not exposing samples to atmosphere between layers. There is a robotic arm that has a direct drive pick-and-place mechanism that provides high reliability, and accurate loading.

Any combination of the following process modules is possible: PR Strip, RIE, PE, ICP, DRIE, PECVD, HDCVD, PVD, ALD.

The system can be configured for 8 inch or 300mm chucks in a footprint that is the same as a typical single chamber system from our competitors.

Trion Technology Benefits:

• Simple, compact, and modular system design
• Full process support both prior to and subsequent to purchase 
• Worldwide sales and service offices
• Dedicated on-site Trion Machine Shop for quick customization and fast turn-around time
• Trion is a private, USA-based company with 25+ year industry experience.